Brooks Instrument SLA7840 - Manual (Page 9)

1-3
Model SLA7840
Section 1 Introduction Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Analog I/O Pin Connections for 15-pin D-Connector:
Flow Temperature Sensitivity
Zero: Less than 0.035% F.S. per
0 C
Span: Less than 0.1% of rate per 0 C
Flow Settling Time
Less than 1 second to within ±2% full scale of final value for a
0-100% step per SEMI Guideline E17-91.
PERFORMANCE CHARACTERISTICS:
Pressure Ranges
Dependent upon remote transducer, maximum 500 psig.
External Sensor Input
Suitable for pressure sensors with maximum 0-10 Vdc output signals.
Pressure Control Range
20:1
Pressure Settling Time
Less than 1 second typical for a 20-100% setpoint step with maximum 2%
overshoot. Actual pressure response highly dependent on system design.
RATINGS:
Operating Pressure
500 psig maximum
Pressure Equipment Directive (PED) 97/23/EC: Equipment falls under
Sound Engineering Practice (SEP).
Leak Integrity
Inboard to Outboard: 1x10
-10 atm scc/sec Helium max.
Ambient Temperature Limits
Operating: 0°C to 60°C (32°F to 140°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Fluid Temperature Limits
0°C to 65°C (32°F to 149°F)