Brooks Instrument SLA7840 - Manual (Page 8)

1-2
Model SLA7840
Section 1 Introduction Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Broad Array of Communication Options
Brooks offers the Model SLA7840 with a traditional 0-5 volt analog option.
Brooks also offers control interface with DeviceNet
TM , a high-speed
(up to 500k baud) digital communication network. Brooks’ communication
capabilities and device-profiles have been certified by the ODVA
TM
(Open DeviceNet Vendor’s Association). Other network protocols are in
development. Talk to your Brooks representative about your specific
needs.
Reduced Cost of Ownership
The Model SLA7840 allows multi-gas and multi-range capabilities to
reduce customer inventory. Storage and pre-programming of up to 10 gas
calibrations easily permits users to switch between different gases and
ranges on a single device. Also, the greater control range provided by the
co-planar valve gives users the option to decrease the number of parts
needed to control their entire process.
1-4 Specifications
Do not operate this instrument in excess of the specifications
listed below. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
WARNING
PERFORMANCE CHARACTERISTICS: Flow
Flow Ranges**
Model SLA7840
Any range from 0-3 sccm to 0-30,000 sccm N
2
eq.
**Standard 0 o and 101kPa (760 Torr). Per SEMI Guideline E12-96.
Flow Accuracy
±1.0% of rate, including linearity (20% to 100% full scale),
±0.2% of full scale (below 20% full scale.)
Flow Repeatability
±0.20% of rate