Model sla7840 – Brooks Instrument SLA7840 User Manual
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Model SLA7840
Contents
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 1 Introduction
Paragraph
Page
Number
Number
1-1
Scope ............................................................................................................................................... 1-1
1-2
Purpose ............................................................................................................................................ 1-1
1-3
Description ....................................................................................................................................... 1-1
1-4
Specifications ................................................................................................................................... 1-2
Section 2 Installation
2-1
General ............................................................................................................................................. 2-1
2-2
Receipt of Equipment ....................................................................................................................... 2-1
2-3
Recommended Storage Practice ...................................................................................................... 2-1
2-4
Return Shipment .............................................................................................................................. 2-2
2-5
Transit Precautions .......................................................................................................................... 2-2
2-6
Removal from Storage ...................................................................................................................... 2-2
2-7
Gas Connections .............................................................................................................................. 2-3
2-8
In-Line Filter ..................................................................................................................................... 2-3
2-9
Installation ........................................................................................................................................ 2-3
2-10 Electrical Interface (Analog I/O) ....................................................................................................... 2-4
2-11 Operation Check Procedure (Analog I/O) ........................................................................................ 2-5
2-12 Electrical Interface (DeviceNet I/O) .................................................................................................. 2-6
2-13 Electrical Interface (Analog I/O) ....................................................................................................... 2-6
Section 3 Operation
3-1
Overview .......................................................................................................................................... 3-1
3-2
Theory of Operation for Flow measurement ..................................................................................... 3-1
3-3
Theory of Operation for Remote Transducer .................................................................................... 3-2
3-4
Analog Mode of Operation ................................................................................................................ 3-4
3-5
DeviceNet Mode of Operation .......................................................................................................... 3-5
3-6
Calibration Data Sets ........................................................................................................................ 3-6
Section 4 Maintenance & Troubleshooting
4-1
Overview .......................................................................................................................................... 4-1
4-2
Troubleshooting ................................................................................................................................ 4-1
4-3
Gas Conversion Factors ................................................................................................................... 4-5
4-4
Orifice Sizing .................................................................................................................................... 4-6
4-5
Restrictor Sizing ............................................................................................................................... 4-6
Section A CE Certification
CE Certification of Mass Flow Equipment ........................................................................................ A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover