Brooks Instrument SLA7840 - Manual (Page 31)

4-7
Model SLA7840
Section 4 Maintenance
& Troubleshooting
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Table 4-3 Model SLA7840 Standard Restrictors
Range
SCCM Nitrogen Equivalent Flow Part Number*
Size Low High ACLFE Wire Mesh
D 8.038 11.38 S-110-Z-275-BMG
G 22.05 31.23 S-110-Z-278-BMG
J 43.23 61.21 S-110-Z-280-BMG
M 118.6 167.9 S-110-Z-283-BMG
P 232.5 329.3 S-110-Z-285-BMG
Q 325.4 460.9 S-110-Z-286-BMG
R 455.7 645.3 S-110-Z-287-BMG
U 1250. 1771. S-110-Z-290-BMG
W 2451. 3471. S-110-Z-292-BMG
1 6724. 9523. S-110-Z-317-BMG
3 13176. 30060. S-110-Z-226-BMG
*Materials: BMG = 316 Stainless Steel Electropolished
NOTES: • If two sizes are allowed because of overlap, select the larger size.
• Restrictor size not required to enter order.
If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.
Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.