Super Systems 9010 Series - Manual (Page 35)

SSi Manual Series 9010 – eSPP Programmer Page 35
GHDELAY This opcode is a guaranteed high short delay opcode. Anything below the high limit will satisfy
the guarantee and allow the soak timer to run.
GHZDELAY This opcode is a guaranteed zone high short delay. Anything below the high limit will satisfy
the guarantee and allow the soak timer to run. It is similar to the GDELAY opcode except that
zone instruments (if available) are included. If load TCs are enabled, the control TC must be
enabled to include the zone instruments. If the Control TC is disabled, the zone instruments will
not be evaluated.
GHZSOAK This is a Guaranteed Soak High opcode for a zone. Anything below the high limit will satisfy the
guarantee and allow the soak timer to run. The option value is the soak time in hours and
minutes. The band limit can be changed by the
SET_WAIT opcode.
GLDELAY
This opcode is a guaranteed low short delay opcode. Anything above the lower limit will
satisfy the guarantee and allow the soak timer to run.
GLZDELAY This opcode is a guaranteed zone low short delay. Anything above the lower limit will satisfy
the guarantee and allow the soak timer to run. It is similar to the GDELAY opcode except that
zone instruments (if available) are included. If load TCs are enabled, the control TC must be
enabled to include the zone instruments. If the Control TC is disabled, the zone instruments will
not be evaluated.
GLZSOAK
This opcode is a guaranteed zone low short soak. Anything above the lower limit will satisfy
the guarantee and allow the soak timer to run. It is similar to the GSOAK opcode except that
zone instruments (if available) are included. If load TCs are enabled, the control TC must be
enabled to include the zone instruments. If the Control TC is disabled, the zone instruments will
not be evaluated.
GOSUB The go to subroutine opcode is used to call a program and then return to the calling program.
This is used to execute standard routines that can be used by many programs. GOSUBs can be
stacked up to eight levels. The option data is the program number.
GTCINQDEL This is a guaranteed TC inquiry short delay opcode. It is used to verify that all active
thermocouples are within the set wait limits around the setpoint for the user defined time period.
The temperature data is the delay time in seconds. The vacuum data is the control TC or the load
tc’s. The options are:
 wait: the PV must be within the wait limit band specified to continue the recipe
 wait up: the PV must be at or above the set point to continue the recipe
 wait down: the PV must be at or below the set point to continue the recipe.
An explanation of wait, wait up, and wait down options can be found at the end of this chapter.
GZDELAY This opcode is a guaranteed short zone delay. It is similar to the GDELAY opcode except that
zone instruments (if available) are included. If load TCs are enabled, the control TC must be
enabled to include the zone instruments. If the Control TC is disabled, the zone instruments will
not be evaluated.
GZRAMP This is a Guaranteed Ramp opcode for a zone. The process value must be within the wait limit
band to allow the ramp timer to run. The temperature data is the temperature set point, the
atmosphere data is the atmosphere setpoint, and the option data is the ramp time in hours and
minutes. The band limit can be changed by the
SET_WAIT opcode.