Bronkhorst Vapor Delivery Module - Manual (Page 6)

Bronkhorst®
Vapor Delivery Module 9.17.079 6
1 Scope of this manual
1.1 Introduction and intended use
The Vapor Delivery Module is a compact integrated system to realize mass flow control of vapor. The Vapor Delivery Module is
intended to generate a predefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately
controlled carrier gas flow with subsequent evaporation inside a temperature controlled chamber.
1.2 References to other applicable documents
Manuals and guides for digital instruments are modular. General instructions give information about the functioning and
installation of instruments. Operational instructions explain the use of the digital instruments features and parameters. Field bus
specific information explains the installation and use of the field bus installed on the instrument.
1.2.1 Related documents
- Instruction manual FLOW-BUS interface (document nr. 9.16.024)
- Instruction manual RS232 interface with FLOW-BUS protocol (document nr. 9.16.027)
- Instruction manual E-8000 Readout and Control System (document nr. 9.17.076)
These documents Contain information for basic and advanced operation, more detailed product information and instructions
for troubleshooting.
1.2.2 Software tooling
For RS232 or FLOW-BUS operation the following Bronkhorst software is available.
FlowDDE Software tool to interface between digital instruments and windows software
FlowView Software tool to operate Bronkhorst digital instruments
Flowfix Software tool for fieldbus connection of digital instruments
FlowPlot Software tool for monitoring and optimizing digital instruments parameters
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Manuals and Software tooling can be found at: http://www.bronkhorst.com/en/downloads