Bronkhorst Vapor Delivery Module - Manual (Page 14)

Bronkhorst®
Vapor Delivery Module 9.17.079 14
4.6.1.2 To start the process
Procedure: Actions:
B1 Set the heater at right temperature Give set point to the heater; wait until the temperature is
stabilized
B2 Start gas flow Give setpoint to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
B3 Start liquid flow Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the process.
The pressure controller of the inert gas supply can influence
the stability of the liquid flow controller.
B4 Connect process Open V7, close V6
4.6.1.3 To stop the process
Procedure: Actions:
C1 Disconnect process Open V6, close V7
C2 Stop liquid flow Give setpoint = 0 to LFC
C3 Optional: Stop gas flow Give setpoint = 0 to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
4.6.1.4 How to leave system overnight
Procedure: Actions:
D1 Relief the supply pressure from the liquid- and
carrier gas lines
Close V2 and V3
4.6.1.5 To empty and purge the system
Procedure (1,2) : Actions:
E1 Relief the supply pressure from the liquid- and
carrier gas lines
Close V2 and V3
E2 Purge liquid out of lines Open V1 and V5
E3 Purge lines with inert gas Open V4, V6
Close V7
Give setpoint to MFC
E4 Optional: purge wit inert liquid Connect inert liquid to inert gas supply, Proceed according
to E2
E5 Optional: Alter E3 and E4 for a few times
(1) If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing
liquid in the system.
(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully
(preferably with inert liquid, E3, E4, E5) before opening the system.
- In case of non-pure liquids, place a filter upstream the liquid flow controller.
- Mount the Vapor Delivery Module upright.