Bronkhorst Vapor Delivery Module - Manual (Page 16)

Bronkhorst®
Vapor Delivery Module 9.17.079 16
4.6.2.3 To stop the process
Procedure: Actions:
C1 Disconnect process Open V6, close V7
C2 Stop liquid flow Give setpoint = 0 to LFC
C3 Optional: Stop gas flow Give setpoint = 0 to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
4.6.2.4 How to leave system overnight
Procedure: Actions:
D1 Relief the supply pressure from the liquid- and
carrier gas lines
Close V2
Open V8 for some seconds
4.6.2.5 To empty and purge the system
Procedure (1,2) : Actions:
E1 Relief the supply pressure from the liquid- and
carrier gas lines
Close V2 and V3
E2 Purge liquid out of lines Open V1 and V4
E3 Purge lines with inert gas Open V4 and V6
Close V7
Give setpoint to MFC
E4 Evacuate liquid lines (cont.) Close V1
Open V8
E5 Optional: Repeat last two steps for a few times
(1) If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing
liquid in the system.
(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully
(preferably with inert liquid, E3, E4, E5) before opening the system.
- In case of non-pure liquids, place a filter upstream the liquid flow controller.
- Mount the Vapor Delivery Module upright.