Bronkhorst Vapor Delivery Module - Manual (Page 15)

Bronkhorst®
Vapor Delivery Module 15 9.17.079
4.6.2 Startup with using vacuum
4.6.2.1 To fill the system
Procedure: Actions:
A1 Evacuate the lines “Vacuum” Start pumps
A2 Evacuate all lines Close: V1, V2, V3, V4, and V6
Make sure that “waste” and “process” are vacuum
Connect inert gas on carrier gas inle.
Open : V5 and V8
Give setpoint to gas and liquid control (the control valves
of the LFC and MFC open)
Pump for a long time
Remark: if the system is not completely dry follow
procedure of E3, E4, (E5)
A3 Purge line between inert gas source and valve V1 Open valve V1 briefly for some seconds.
A4 Purge line between process gas source and gas MFC Give setpoint = 0 to LFM (mix valve closes)
Open valve V3 briefly for some seconds
A5 Pump down liquid supply Open V2 for some time
Close V2
A6 Setup carrier gas Close V8
Open V3
A7 Fill the system with liquid Close V1
Open B2 briefly; allow mixing valve VDM to fill
Close V5
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
A8 Optional: degassing mixing valve Open V5, a needle valve will be best, to avoid too much
liquid be pumped away
A9 The system is now ready for use
4.6.2.2 To start the process
Procedure: Actions:
B1 Set the heater at right temperature Give setpoint to the heater, wait until temperature is
reached
B2 Start gas flow Give setpoint to MFC
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
B3 Start liquid flow Give setpoint LFC, wait until stabilization
Close supply pressure of the liquid vessel during the process.
The pressure controller of the inert gas supply can influence
the stability of the liquid flow controller.
B4 Connect process Open V7, close V6