Bronkhorst Vapor Delivery Module - Manual (Page 13)

Bronkhorst®
Vapor Delivery Module 13 9.17.079
4.6 Purging / filling
4.6.1 Startup without using vacuum
4.6.1.1 To fill the system
Procedure: Actions:
A1 Purge all lines Close V2, V3 and V7
Open V1, V4, V5 and V6
Give setpoint 100% to MFC
Give setpoint 0% to LFC
Purge for a long time.
A2 Setup carrier gas supply Close V4
Open V3
A3 Fill the system with liquid. Close V1
Open V2 briefly; allow mixing valve VDM to fill.
Wait until all gas bubbles left the system via Purge out
and V5, then close V5.
Make sure that the carrier gas is always flowing when the
liquid flow is on. Preferably, let always gas flow in the
carrier gas line when the system is filled with liquid.
A4 The system is now ready for use.