Bronkhorst Mass Flow - Manual (Page 5)

BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1. Introduction
1.1 General description ..................................................................................................................... page 7
1.1.1 Gas flow ..................................................................................................................................... page 7
1.1.2 Liquid flow .................................................................................................................................. page 7
1.1.3 Pressure ..................................................................................................................................... page 7
1.2 Housings .................................................................................................................................... page 7
1.2.1 EL-FLOW, EL-PRESS (Euro-style) ........................................................................................... page 7
1.2.2 Liquid flow meters / controllers .................................................................................................. page 7
1.3 Valves ........................................................................................................................................ page 8
1.3.1 Laboratory style ......................................................................................................................... page 8
1.3.2 Industrial style ............................................................................................................................. page 8
1.4 Sensor principles ....................................................................................................................... page 8
1.4.1 Gasflow sensors ........................................................................................................................ page 8
1.4.2 Liquid flow sensors .................................................................................................................... page 8
1.4.3 Pressure sensor ......................................................................................................................... page 9
1.5 Valve principles .......................................................................................................................... page 9
1.5.1 Solenoid valve ............................................................................................................................ page 9
1.5.2 Vary-P valve ............................................................................................................................... page 9
1.5.3 Pilot operated valve ................................................................................................................... page 10
1.5.4 Bellows valve ............................................................................................................................. page 10
1.6 Sensors and laminar flow devices ............................................................................................. page 10
1.7 Electronics ................................................................................................................................. page 11
1.8 Conversion factors ..................................................................................................................... page 12
1.8.1 Gas conversion factors .............................................................................................................. page 12
1.8.2 Liquid conversion factors ........................................................................................................... page 14
1.8.3 Software for conversion factor calculation .................................................................................. page 14
2. Installation
2.1 Receipt of equipment ................................................................................................................. page 15
2.2 Return shipment ......................................................................................................................... page 15
2.3 Service ....................................................................................................................................... page 15
2.4 Mounting .................................................................................................................................... page 15
2.5 In-line filter ................................................................................................................................. page 16
2.6 Fluid connections ....................................................................................................................... page 16
2.7 Piping ......................................................................................................................................... page 16
2.8 Electrical connections ................................................................................................................ page 17
2.9 Caution ....................................................................................................................................... page 17
2.10 Supply pressure ......................................................................................................................... page 17
2.11 System purging .......................................................................................................................... page 17
2.12 Seals .......................................................................................................................................... page 17
2.13 Equipment storage ..................................................................................................................... page 17
2.14 Electromagnetical compatibility ................................................................................................. page 18
2.14.1 Conditions for compliance with EMC requirements .................................................................... page 18