Bronkhorst Mass Flow User Manual
Page 13
BRONKHORST HIGH-TECH B.V.
The approximate accuracy of the conversion factors listed is:
typical for conversion factors;
> 1
2% x factor
< 1
2% / factor
However, as the accuracy of the factor also depends on viscosity, pressure and temperature, special
attention should be taken for gases in the gas/liquid state where specific heat, density and viscosity can vary
tremendously. Apply to factory for more detailed information.
For gas mixtures a good approach is the following simplified equation:
1
1
1
2
2
C
V
C
V
C
mix
=
+
+
.....
V
C
n
n
C
mix
= Conversion factor for gas mixture
C
n
= Conversion factor for gas n
V
n
= Volumetric part of gas n in the mixture
Example Gas mixture contains:
(1) 10% N
2
C1 = 1,00
(2) 30% Ar
C2 = 1,40
(3) 50% CH
4
C3 = 0,76
(4) 10% He
C4 = 1,41
1
010
100
0 30
140
0 50
0 76
010
141
1043
C
mix
=
+
+
+
=
,
,
,
,
,
,
,
,
,
C
mix
= 0,959
When the original meter has been calibrated on 500 ml
n
/min N
2
, 100% means:
500
00
,1
959
,
0
⋅
= 480 ml
n
/min mixture.
When the original meter has been calibrated on 500 ml
n
/min Argon, then 100% means:
500
40
,1
959
,
0
⋅
= 343 ml
n
/min gas mixture.
9.17.001
page 13