INFICON XTC/3 Thin Film Deposition Controller Communications Library Operating Manual User Manual
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XTC/3 Communications Library Operating Manual
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Max Power
int setFilmMaxPower (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmMaxPower (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
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Density
int setFilmDensity (float *val, int index , char* ErrMsg, BOOL TCP);
int getFilmDensity (float *val, int index, char* ErrMsg, unsigned short
*len, BOOL TCP);
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Z-Ratio
int setFilmZRatio (float *val, int index , char* ErrMsg, BOOL TCP);
int getFilmZRatio (float *val, int index, char* ErrMsg, unsigned short
*len, BOOL TCP);
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Time Power
int setFilmTimePower (unsigned long *val, int index , char* ErrMsg,
BOOL TCP);
int getFilmTimePower (unsigned long *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
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Delay option
int setFilmDelayOption (unsigned long *val, int index , char* ErrMsg,
BOOL TCP);
int getFilmDelayOption (unsigned long *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
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Transfer Sensor
int setFilmTrsferSensor (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmTrsferSensor (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
33
Transfer Tooling
int setFilmTrsferTooling (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmTrsferTooling (float *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
34
Control Delay
Time
int setFilmCtrlDelayTime (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmCtrlDelayTime (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
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Ion Assisted Deposit int setFilmIonDep (unsigned long *val, int index , char* ErrMsg,
BOOL TCP);
int getFilmIonDep (unsigned long *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
Table 1-1 Film Parameters accessible via Set and Get (continued)
Command ID
Description
Function