INFICON XTC/3 Thin Film Deposition Controller Communications Library Operating Manual User Manual
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XTC/3 Communications Library Operating Manual
9
Final Thickness
int setFilmFinThick (float *val, int index , char* ErrMsg, BOOL TCP);
int getFilmFinThick (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
10
Thickness Set Point int setFilmThickSetOpt (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmThickSetOpt (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
11
New Rate
int setFilmNewRate (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmNewRate (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
12
Rate Ramp Time
int setFilmRateRampTime (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmRateRampTime (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
13
RateWatcher
Accuracy
int setFilmRateWatchAcc (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmRateWatchAcc (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
14
RW Hold Time
int setFilmRWHoldTime (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);
int getFilmRWHoldTime (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);
15
Sensor
int setFilmSensor (unsigned long *val, int index , char* ErrMsg,
BOOL TCP);
int getFilmSensor (unsigned long *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);
16
Tool Factor 1
int setFilmToolFctr1 (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmToolFctr1 (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
17
Tool Factor 2
int setFilmToolFctr2 (float *val, int index , char* ErrMsg, BOOL
TCP);
int getFilmToolFctr2 (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);
Table 1-1 Film Parameters accessible via Set and Get (continued)
Command ID
Description
Function