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INFICON XTC/3 Thin Film Deposition Controller Communications Library Operating Manual User Manual

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XTC/3 Communications Library Operating Manual

9

Final Thickness

int setFilmFinThick (float *val, int index , char* ErrMsg, BOOL TCP);

int getFilmFinThick (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);

10

Thickness Set Point int setFilmThickSetOpt (float *val, int index , char* ErrMsg, BOOL

TCP);

int getFilmThickSetOpt (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);

11

New Rate

int setFilmNewRate (float *val, int index , char* ErrMsg, BOOL
TCP);

int getFilmNewRate (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);

12

Rate Ramp Time

int setFilmRateRampTime (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);

int getFilmRateRampTime (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);

13

RateWatcher
Accuracy

int setFilmRateWatchAcc (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);

int getFilmRateWatchAcc (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);

14

RW Hold Time

int setFilmRWHoldTime (unsigned long *val, int index , char*
ErrMsg, BOOL TCP);

int getFilmRWHoldTime (unsigned long *val, int index, char*
ErrMsg, unsigned short *len, BOOL TCP);

15

Sensor

int setFilmSensor (unsigned long *val, int index , char* ErrMsg,
BOOL TCP);

int getFilmSensor (unsigned long *val, int index, char* ErrMsg,
unsigned short *len, BOOL TCP);

16

Tool Factor 1

int setFilmToolFctr1 (float *val, int index , char* ErrMsg, BOOL
TCP);

int getFilmToolFctr1 (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);

17

Tool Factor 2

int setFilmToolFctr2 (float *val, int index , char* ErrMsg, BOOL
TCP);

int getFilmToolFctr2 (float *val, int index, char* ErrMsg, unsigned
short *len, BOOL TCP);

Table 1-1 Film Parameters accessible via Set and Get (continued)

Command ID

Description

Function