INFICON Crystal 12 Sensor - Manual (Page 47)

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Crystal12 Sensor Operating Manual
Š Alignment tool assembly 750-254-G2 (Included in 750-268 kit)
Š Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
NOTE: 75 PSIG (5.2 bar) [520 kPa] is for alignment purposes only.
4.3.2 Procedure
With the required equipment at hand, proceed as follows:
1 Temporarily connect an air supply to the bellows assembly (item 37, Figure 1-5
on page 1-8 ) supply tube. Regulate the air pressure to 75 PSIG (5.2 bar) [520
kPa].
2 Insert the 0.09375" diameter alignment pin (of the 750-254-G2 assembly) in the
alignment hole (if not already installed) as shown in
Figure 4-1 . The crystal
carousel may need to be rotated to achieve the alignment condition shown in
Figure 4-1 .
Figure 4-1 Alignment Pin Installation
3 Remove the actuator cover (item 22, Figure 1-6 on page 1-9 ) and its related
hardware (items 6 and 7, Figure 1-6 on page 1-9 ).
4 Loosen the set screws (two set screws per item) of the ratchet (item 29, Figure
1-5 on page 1-8 ) and the stop ratchet (item 31, Figure 1-5 on page 1-8 ).
5 Loosen the #2 fastener (item 5, Figure 1-5 on page 1-8 ) that attaches the detent
(item 25, Figure 1-5 on page 1-8 ) to the bellows assembly item 37, Figure 1-5
on page 1-8 ). Do NOT remove detent.
Crystal Carousel
0.09375 dia. Alignment Pin
750-254-G2
Carousel
Housing
Weldment
Front
Deposition
Shield