INFICON Crystal 12 Sensor User Manual
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Crystal12 Sensor Operating Manual
If a crystal switch is initiated while the Cygnus Channel is in Deposit, the Crystal12
will advance to the next "good" crystal, skipping the failed crystals.
If a crystal switch is initiated and the Channel is not in Deposit, the Crystal12 will
advance to the next position regardless of the status (good or failed) of the crystal
in this position.
If a Start command is given to the Channel and the Crystal12 is currently on a failed
crystal the instrument will automatically crystal switch to the next known good
crystal before entering Deposit.
If the last known good crystal fails while in Deposit, the Channel will go into Time
Power, Idle Ramp, or Stop, depending on the value of the Channel's "CRYSTAL
FAIL OPTION" parameter.
2.6 Crystal12 Sensor Requirement when
Not Installed with a Cygnus
The Crystal12 can be manually operated with other Deposition Controllers. The
user must, however, be aware of the functional requirements for operation. These
include, but are not limited to:
1
The three-way solenoid valve assembly must be energized and de-energized
once per crystal position. Twelve pulses complete one revolution.
2
The electrical pulse applied to the solenoid valve must be at least one second
in duration during both the pressurization (energized) and de-pressurization
(de-energized) phase.
3
A 24 volt AC or DC supply is required to energize the solenoid assembly.
Consult
for wiring assignments.
4
The user should provide some means of determining the quantity of “good”
crystals when initially loaded, and quantity of good crystals remaining at any
time.
5
Follow the guidelines shown in
for installation.
6
You will need to keep track of the total thickness as a manually generated sum
of the deposit accumulated at each crystal position.