INFICON Crystal 12 Sensor - Manual (Page 29)

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Crystal12 Sensor Operating Manual
2.2.1 Cygnus Deposition Controller
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(Microdot/BNC).
2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
of the feedthrough.
3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
760-600-G1).
4 Connect one end of the XIU cable (IPN 600-1039-Gxx) to the mating connector
of the XIU.
5 Connect the other end of the XIU cable to a sensor channel at the rear of the
controller.
6 Connect power to the controller and set the power switch to ON. The instrument
will power up in the ALL CHANNELS display.
Š If the RATE field corresponding to the sensor channel selected in the
previous step is displayed in normal video and is actively being updated,
you can assume the sensor is in proper working order and may be installed.
Š If the RATE field is displayed in inverse video, a failed crystal condition
exists for the specific channel. The carousel assembly (item 15, Figure 1-5
on page 1-8 ) may have to be manually advanced by hand to make an
electrical contact to correct the failed condition.
NOTE: The carousel assembly may also be advanced by temporarily
connecting a regulated air supply (80-90 PSIG (5.5 bar - 6.2 bar)
[550 kPa - 620 kPa]) to the tube of the bellows assembly (item 37,
Figure 1-5 on page 1-8 ).
2.3 General Guidelines for Crystal12 Sensor
Figure 2-1 shows the typical installation of an INFICON water-cooled crystal sensor
in the vacuum process chamber. Refer to Chapter 3 for information regarding the
installation of the solenoid valve assembly (750-420-G1) used to pneumatically
index the sensor. Use the illustration and the following guidelines to install your
sensor(s) for optimum performance and convenience.