Despatch Stackable LCC/LCD - Manual (Page 42)

O PERATION Stackable LCC/LCD Oven Owner ’s Manual
42 Version 26
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8. The third and final segment is the COOLDOWN MODE. In Cooldown mode, water
valves are energized to bring the chamber to a safe unloading temperature (Figure
16).
Figure 16. Water and Nitrogen Piping Schematic.
Figure 15. Adjust Nitrogen Maintain Needle
Valve.