Brooks Instrument 5851E - Manual (Page 9)

1-3
Brooks ® Model 5851E
Section 1 Introduction
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
1-33 Specifications
WARNING
Do not operate this instrument in excess of the specifications listed
below. Failure to heed this warning can result in serious personal
injury and/or damage to the equipment.
Standard Ranges
Any full scale flowrate from 10 slpm to 100 slpm* (Nitrogen equivalent), up
to 200 slpm Hydrogen.
*Standard temperature and pressure in accordance with SEMI (Semiconductor
Equipment and Materials International) standard: 0° C and 101.3 kPa (760 Torr).
Accuracy
±1% full scale including linearity at calibration conditions
Repeatability
0.25% of rate
Response Time
Less than 3 seconds response to within 2% of full scale final value with a
0 to 100% command step.
Power Requirements
+15 Vdc ±5%, 350 mA
-15 Vdc ±5%, 350 mA
10.5 watts power consumption
Class III Equipment: The dc Mains input shall be supplied from a SELV
(Separated Extra-Low Voltage) source.
Ambient Temperature Limits
Operating: 40°F to 150°F (5°C to 65°C)
Non-Operating: -13°F to +212°F (-25°C to +100°C)
Working Pressure
1500 psi (10.342 MPa) maximum
Differential Pressure
10 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.
Output Signal
0-5 Vdc into 1000 ohms or greater. Maximum ripple 3 mV
5 Volt Reference Output
5 Volts ±0.2%. Maximum load 1 k ohms
Temperature Sensitivity
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift over 10-50° C range
Power Supply Sensitivity
±0.09% full scale per % power supply voltage variation