beautypg.com

Brooks, Model 5851e – Brooks Instrument 5851E User Manual

Page 55

background image

Brooks

®

Model 5851E

5-3

Section 5 Parts List

Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008

Item

Qty.

Description

Part Number

No.

1

1

Jam Nut

573B027ACK

2

1

Coil Assembly

S185Z271AAA

3

4

Screw, Valve

751C322AWA

4

1

Retaining Plate

715Z169CZ%

5

1

O-ring, Valve Stem, Size 016

375B016***

6

1

Valve Stem, High Flow

S949Z203QOA

6A

1

Valve Plug

953Z068BMT

6B

1

Valve Ring

763Z064***

6C

1

Valve O-ring

375B016***

7

1

Valve Plunger Assy., High Flow

S622Z165AAA

8

1

Lower Guide Spring

820Z083BMA

9

AR

Small Valve Spacer, 0.005" Thick

810A362BMA

9

AR

Small Valve Spacer, 0.010" Thick

810A363BMA

10

AR

Large Valve Spacer, 0.005" Thick

810A368BMA

10

AR

Large Valve Spacer, 0.010" Thick

810A361BMA

Valve Seat with Viton Insert

S715Z051AAG

11

1

Valve Seat with Buna Insert

S715Z050AAG

Valve Seat with Kalrez Insert

S715Z163AAA

Valve Seat Solid 316 Stainless Steel

715Z181BNT

Stainless

ID 0.0040

577Z275BMT

ID 0.0067

577Z277BMT

ID 0.0091

577Z280BMT

ID 0.0120

577Z283BMT

ID 0.0160

577Z286BMT

ID 0.0210

577Z289BMT

12

1

Orifice

ID 0.0260

577Z293BMT

ID 0.0310

577Z296BMT

ID 0.0360

577Z300BMT

ID 0.0410

577Z305BMT

ID 0.0465

577Z308BMT

ID 0.0550

577Z310BMT

(Refer to Section 4-6

ID 0.0635

577Z312BMT

for sizing)

ID 0.0700

577Z314BMT

ID 0.0760

577Z316BMT

ID 0.0820

577Z319BMT

ID 0.0935

577Z322BMT

ID 0.1065

577Z328BMT

ID 0.1200

577Z333BMT

ID 0.1405

577C336BMT

13

1

O-ring, Orifice, Size 011

375B011***

14

1

Controller Body w/ Weld Studs

S854Z157BMA

15

1

PC Board Assembly (Card Edge)

S097Y824AAA

(D-Connector)

S097Y847AAA

16

1

Sensor Assembly

S774Z607AAA

17

2

O-ring, Sensor, Size 004

375B004***

18

2

Allen Nut, Sensor-Body

573Q103ACZ

19

2

Lock Washer, Sensor

962D005AWA

20

5

Screw, Sensor-PC Board-Cover

753L056AWZ

21

1

Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)

22

1

O-ring, Restrictor, Size 026

375B026***

23

1

Electronics Cover Can (Card Edge)

219Z389EA%

(D-Connector)

219Z390EA%

23A

1

Cover Plate (D-Con. Version Only)

852Z209EA%

24

1

PC Board Mounting Bracket

079Z135EAA

25

1

Centrating Ring (Card Edge Only)

106D073MDQ
106D072MDQ

26

2

Pot Hole Plug

620Z434SXA

***QTA = Viton, SUA = Buna, TTA = Kalrez, AR = As Required, NS = Not Shown

Table 5-1 Model 5851E Replacement Parts List