Brooks Instrument 5851E - Manual (Page 56)

5-4
Brooks ® Model 5851E
Section 5 Parts List Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 5-2. Tool and Spare Kits for Model 5851E.
5850 Series Service Tool Kit Model 5851 Header Removal Tool
P/N S778D017AAA P/N S817Z036AAA
Permits the complete disassembly of the 5850E Series Model 0550/5851 Orifice Removal Tool
for servicing P/N S908Z049AAA
Contains:
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool
1 - Ball Point Allen Wrench
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver
5850 Series Break Out Board Assembly 5850 Series Valve Shim Kit
P/N S273Z649AAA for Card Edge version P/N S810A372BMA
S273Z668AAA for D-Connector version
Installs directly between mass flow controller and Contains:
interconnecting cable. Allows convenient access to 1 - .010" Large Spacer
all signals for easy troubleshooting of system 2 - .005" Large Spacers
1 - .010" Small Spacer
Contains: 2 - .005" Small Spacers
1 - Break Out PC Board
1 - 5 foot Extension Cable
1 - Terminal PC Board
***QTA = Viton, SUA = Buna, TTA = Kalrez
Note: Refer to Brooks publication DS-5800 for additional accessories.
Table 5-1 Model 5851E Replacement Parts List (Continued)
Item Qty. Description Part Number
No.
Fittings:
1/4" Compression, Swagelok
320B136BMA
1/4" Male VCR, Cajon 315Z036BMA
NS 2 1/4" Male VCO, Cajon 315Z035BMA
3/8" Compression Fitting 320B150BMA
3/8" Male VCO (3/8" or 1/2" Tube) 315Z033BMA
3/8" Male VCR (3/8" or 1/2" Tube) 315Z034BMA
27 2 O-ring, Fitting, Size 906 375B906***
NS 2 O-ring, Fitting, Size 010 375B010***
NS 1 O-ring, End Block, Size 029 375B029***
Interconnecting Cables: Length Card Edge D-Connector
Connector on one end 5 Feet S124Z469AAA S124Z361AAA
with no termination 10 Feet S124Z470AAA S124Z362AAA
NS on other end 25 Feet S124Z471AAA S124Z363AAA
1 50 Feet S124Z472AAA S124Z435AAA
Card Edge D-Connector
Connector on one end 5 Feet S124Z669AAA S124Z576AAA
NS with Connector for Model 5870 10 Feet S124Z539AAA S124Z577AAA
Series Secondary 25 Feet S124Z562AAA S124Z578AAA
Electronics on other end 50 Feet S124Z670AAA S124Z579AAA
NS 2 8-32 Mounting Screw Customer Supplied
28 1 End-block with integral inlet screen S079Z200AAA
29 4 Screw, End-block 751Z105AA0
***QTA = Viton, SUA = Buna, TTA = Kalrez, AR = As Required, NS = Not Shown
Additional publications available: MFC Contamination Control & Valve Application Guide/Service Manual