Brooks Instrument SLA5840 - Manual (Page 8)

1-2
Brooks ® Model SLA5840
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009
Control algorithm to rapidly adjust the valve actuation to match setpoint.
Process data and commands may be wired using either traditional 5 volt
analog connections or digital communications networks, the measurement
and control performance is the same!
The SLA5800 family of products takes advantage of modular design in
both mechanical and electrical construction. This modularity allows for
simplified customer ordering and factory configuration, enabling Brooks to
more easily meet the ever changing needs of our global customers.
Brooks' production flexibility translates into reduced lead times for our
customers. This flexibility allows products using both traditional analog
connections or leading edge network communications protocols.
The SLA5800 series of controllers can directly replace existing analog
products bringing with them greatly improved accuracy. Analog and digital
applications will see settling time improvements with an insensitivity to
varying process conditions, due to Brooks' proprietary Adaptive Valve Control
algorithm.
1-4 Specifications
Performance Characteristics:
Flow Ranges**
Model SLA5840
Any range from 0-3 sccm to 0-30,000 sccm N
2
eq.
**Standard: 0° and 101kPa (760 Torr). Per SEMI Guideline
E12-96.
Flow Control Range
(50:1) - elastomeric valve seat
Flow Accuracy
±1.0% of rate, including linearity (20% to 100% F.S.), ±0.2% of F.S. (below
20% full scale)
Flow Repeatability
±0.20% of rate
Flow Temperature Sensitivity
Zero: Less than 0.05% F.S. per °C
Span: Less than 0.1% of rate per°C
Flow Settling Time
Actual flow:
Less than 800 ms to within ±2% full scale of final value for a 0-100% step.
Constant step response of less than 800 ms for all other transient steps.