Brooks Instrument SLA5840 - Manual (Page 15)

2-3
Brooks ® Model SLA5840
Section 2 Installation Installation and Operation Manual
X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009
Recommended installation procedures:
a. The Delta Class EL Series RT should be located in a clean, dry atmo-
sphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The Delta Class EL Series RT can be installed in any position. How-
ever, mounting in orientations other than the original factory calibration
(see calibration data sheet supplied with the instrument) can result in a
<±0.5% maximum full scale shift after re-zeroing.
e. When installing a mass flow controller or meter with full scale flow rates
of 10 slpm or greater, be aware that sharp, abrupt angles in the system
piping directly upstream of the controller may cause a small shift in
accuracy. If possible, have at least ten pipe diameters of straight tubing
upstream of the mass flow controller or meter. This is not required for
meters with an integrated filter.
2-8 In-Line Filter
It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve. The filtering element should be
replaced periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Models Maximum Flow Rate Recommended Filter
SLA5840 100 ccm 2 micron
SLA5840 500 ccm 2 micron
SLA5840 1 to 5 lpm 10 micron
SLA5840 10 to 100 lpm 40 micron