Brooks Instrument SLA5840 - Manual (Page 5)

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Brooks ® Model SLA5840
Contents Installation and Operation Manual
X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope ......................................................................................................................................... 1-1
1-2 Purpose ...................................................................................................................................... 1-1
1-3 Description ................................................................................................................................. 1-1
1-4 Specifications ............................................................................................................................. 1-2
Section 2 Installation
2-1 General ...................................................................................................................................... 2-1
2-2 Receipt of Equipment ................................................................................................................. 2-1
2-3 Recommended Storage Practice ............................................................................................... 2-1
2-4 Return Shipment ........................................................................................................................ 2-2
2-5 Removal from Storage ............................................................................................................... 2-2
2-6 Gas Connections ........................................................................................................................ 2-2
2-7 Installation .................................................................................................................................. 2-2
2-8 In-Line Filter ............................................................................................................................... 2-3
2-9 Operation Check Procedure (Analog I/O) .................................................................................. 2-4
2-10 Digital I/O: DeviceNet or F OUNDATION Fieldbus .......................................................................... 2-4
Section 3 Operation
3-1 Overview .................................................................................................................................... 3-1
3-2 Theory of Operation for RT ........................................................................................................ 3-1
3-3 Features ..................................................................................................................................... 3-1
3-4 Analog I/O Mode of Operation .................................................................................................... 3-2
Section 4 Maintenance & Troubleshooting
4-1 Overview .................................................................................................................................... 4-1
4-2 Troubleshooting .......................................................................................................................... 4-2
4-3 Gas Conversion Factors ............................................................................................................ 4-4
4-4 Orifice Sizing .............................................................................................................................. 4-5
4-5 Restrictor Sizing ......................................................................................................................... 4-8
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................ A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover