Brooks Instrument SLA5840 - Manual (Page 7)

Brooks ® Model SLA5840
1-1
Section 1 Introduction Installation and Operation Manual
X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009
1-1 Scope
Thank you for purchasing a Brooks Instrument Remote Transducer
Pressure Controller/Flowmeter Product. This manual, X-PR-SLA5800-RT-
eng is an installation and operation manual for your instrument.
If you have purchased a Brooks
® Digital Mass Flow Product with DeviceNet
Communications, a separate DeviceNet Instruction Manual shall also be
provided as part of the operating documentation.
1-2 Purpose
The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring and controlling both pressure and the
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
® RT.
This manual is organized into the following sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance & Troubleshooting
Section A CE Certification
Back Cover Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.
1-3 Description
The Brooks ® Model SLA5840 Pressure Controller/Flowmeter controls
pressure while also measuring flow rate. The Model SLA5840 receives a
remote pressure transducer signal, and using adjustable integral PID
control electronics and control valve, will maintain a desired set pressure.
In addition to the pressure control function, the Model SLA5840 provides a
0-5 V signal which is linear with mass flow rate. The Model SLA5840 can
also be configured as a mass flow controller for calibration or test
purposes.
Brooks now offers control interface with DeviceNet TM , a high-speed (up to
500k baud) digital communication network adopted by the Semiconductor
industry. Brooks' communications capabilities and device-profile have been
certified by the ODVA
TM (Open DeviceNet Vendors’ Association). Other
network protocols are in development. Talk to your Brooks representative
about your specific needs.
The MFC's microprocessor uses a multi-point calibration curve, to deal
with residual sensor non-linearity, yielding a highly accurate process signal.
The microprocessor then executes Brooks’ proprietary Adaptive Valve