Brooks, Model sla5840 – Brooks Instrument SLA5840 User Manual
Page 25
4-3
Brooks
®
Model SLA5840
Section 4 Maintenance
& Troubleshooting
Installation and Operation Manual
X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009
2.
Clogged sensor tube. If the MFC sensor tube is clogged, the flow
signal will be very low or zero while the actual flow will be at the
valve's maximum rate.
3.
Clogged restrictor. If the MFC restrictor becomes clogged, a much
larger portion of the flow stream will pass through the sensor rather
than going straight through the restrictor. The symptom of this
condition is a substantially reduced actual flow with a flow signal
that matches the setpoint.
4.
Valve Override pin is active. If the valve override pin is active, the
valve will be forced open or closed. Set this pin to its normal level
before setting a setpoint.
Figure 4-1 Bench Troubleshooting Circuit
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