Atec Agilent-4395A - Manual (Page 17)

Figure 1-7. Impedance Measurement Accuracy
|Z| -
θ
Accuracy
|Z| accuracy Z
a
=
A
+ (
B/ Z
m
+
C
×
Z
m
) ×
100
[
%
]
θ
accuracy
θ
a
=
sin
− 1 (
Z
a
/100
)
Where, is measured. A, B, and C are obtained from Figure 1-7. Z
m
Z
17