INFICON PCG55x ATM to Medium Vacuum Gauge - Manual (Page 22)

22 tina56e1-d (2014-01)
Valid in the range 0.375 … 2.842 V
p = a + bU + cU
2
+ dU
3
+ eU
4
+ fU
5
a –0.02585 c 0.04563 e –0.04158
b 0.03767 d 0.1151 f 0.008737
where p pressure in Torr a, b, c, d, e, f constant
U output signal
Valid in the range 2.842 … 4.945 V
a + cU + eU
2
p =
1 + bU + dU
2
+ fU
3
a 0.1031 c –0.02322 e 0.07229
b –0.3986 d 0.07438 f –0.006866
where p pressure in Torr a, b, c, d, e, f constant
U output signal
Valid in the range 4.945… 5.659 V
a + cU
p =
1 + bU + dU
2
a 100.624 c –20.5623
b –0.37679 d 0.0348656
where p pressure in Torr a, b, c, d constant
U output signal