INFICON PCG55x ATM to Medium Vacuum Gauge - Manual (Page 10)

10 tina56e1-d (2014-01)
2 Technical Data
For further technical data for gauges with DeviceNet and
Profibus interface →  [3], [4], [5], [6].
Measurement range 5×10
-5
… 1500 mbar
Measurement principle
10 mbar … 1500 mbar
diaphragm capacitive
sensor
1 … 10 mbar crossover range
5×10
-5
… 1 mbar thermal conductance acc. to
Pirani
Accuracy (N
2
)
5Ч10
-4
… 1Ч10
-3
mbar
±50% of
reading
1×10
-3
… 100 mbar ±15% of reading
100 … 950 mbar ±5% of reading
950 … 1050 mbar ±2.5% of reading
Repeatability (N
2
)
1×10
-3
… 1100 mbar
±2% of
reading
Output signal (measurement signal)
Voltage range
3PCx-0xx-xxx0
0 … +10.23 V
3PCx-0xx-xxx1 0 … +8.68 V
3PCx-0xx-xxx2 0 … +5.659 V
3PCx-0xx-xxx3 0 … +9.05 V
Measurement range
3PCx-0xx-xxx0
+0.61 … +10.23 V
3PCx-0xx-xxx1 +1.2 … +8.68 V
3PCx-0xx-xxx2 +0.375 … +5.659 V
3PCx-0xx-xxx3 +1.57 … +9.05 V
Error signal 0 V (default)