1 output signal vs. pressure, P = 10, U = c +1.286log – INFICON PCG55x ATM to Medium Vacuum Gauge User Manual

Page 19: Valid in the range 5×10, Mbar

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tina56e1-d (2014-01)

2.1

Output Signal vs. Pressure

Measurement range 0.61 … 10.23 V

Output signal U [V]

Pressure p

0.0

0.61

3.0

2.5

2.0

1.5

1.0

0.5

4.0

3.5

5.0

4.5

6.0

5.5

7.0

6.5

8.0

7.5

9.0

8.5

10.0

9.5

10.5

1E+05

1E+04

1E+03

1E+02

1E+01

1E+00

1E–01

1E–02

1E–03

1E–04

1E+06

1E–05

Err

mbar

Torr

p = 10

0.778(U-c)

⇔

U = c +1.286log

valid in the range

5×10

-5

mbar

U p

[V] [mbar]

6.143

[V] [micron]

2.448

[V] [µbar]

2.287

[V] [Pa]

3.572

[V] [Torr]

6.304 [V] [kPa]

7.429

[V] [mTorr]

2.448

where p pressure

U output signal
c constant (pressure unit dependent)