10 eum, 11 fil, 12 fsr – INFICON VGC403 Three-Channel Measurement and Control Unit User Manual
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tinb07e1-e 2011-07 Vacuum Gauge Controller
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bined by the logical operator OR. Example: 1001 =
Device error and syntax error.
6.3.10 EUM
Switch the emmision. See Chapter 5.2.10 Emission
(EMi), 26.
S: EUM[,a,b,c]
R:
S:
R: a,b,c
6.3.11 FIL
Filter. Measurement filter. See Chapter 5.2.1 Measure-
ment filter (FiLt), 23.
S: FIL[,a,b,c]
R:
S:
R: a,b,c
6.3.12 FSR
Full scale range. Full scale range of linear sensors
(CDG). See Chapter 5.2.3 Measuring range (FS), 24.
S: FSR[,a,b,c]
R:
S:
R: a,b,c
Parameter
Significance
a
Emission for channel 1
0 = Manually
1 = Automatic (default)
b
Emission for channel 2
(see above)
c
Emission for channel 3
(see above)
Parameter
Significance
a
Filter for channel 1
0 = Fast
1 = Medium (default)
2 = Slow
b
Filter for channel 2
(see above)
c
Filter for channel 3
(see above)
Parameter
Significance
a
Full scale range of sensor 1
0 = 0.01 mbar
1 = 0.01 Torr
2= 0.02 Torr
3 = 0.05 Torr
4 = 0.10 mbar
5 = 0.10 Torr
6 = 0.25 mbar
7 = 0.25 Torr
8 = 0.50 mbar
9 = 0.50 Torr
10 = 1 mbar
11 = 1 Torr
12 = 2 mbar
13 = 2 Torr
14 = 5 mbar
15 = 5 Torr
16 = 10 mbar
17 = 10 Torr
18 = 20 mbar
19 = 20 Torr
20 = 50 mbar
21 = 50 Torr
22 = 100 mbar
23 = 100 Torr
24 = 200 mbar
25 = 200 Torr
26 = 500 mbar
27 = 500 Torr
28 = 1000 mbar
29 = 1100 mbar
30 = 1000 Torr
31 = 2 bar
32 = 5 bar
33 = 10 bar
34 = 50 bar
b
Full scale range of sensor 2
(see above)
c
Full scale range of sensor 3
(see above)