8 interfacing to inficon deposition controllers, 1 interfacing to sqc-310 deposition controller, 1 bcd i/o – INFICON CI-100 Crucible Indexer User Manual
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CI-100 Crucible Indexer Operating Manual
2.8 Interfacing to INFICON Deposition Controllers
2.8.1 Interfacing to SQC-310 Deposition Controller
2.8.1.1 BCD I/O
BCD wiring between the CI-100 and SQC-310 is preferred over Binary I/O wiring
because it uses fewer SQC-310 relays. The cable wiring below interfaces the
SQC-310 I/O connector to the CI-100 BCD I/O connector:
SQC-310
CI-100 BCD I/O
Pin 14------------->-------------- Pin 1
OutX Pocket Bit1
Pin 1 -------------->-------------- Pin 2
OutX Pocket Bit2
Pin 3 -------------->-------------- Pin 7
OutX Pocket Bit3
Pin 16 ------------<-------------- Pin 5
OutX Pocket Ready
Pin 15,2,4------------------------ Pin 6
Common
Short Pin 3 to Pin 9
Interlock
Short Pin 4 to Pin 8
Pocket Ready A
On the CI-100 rear panel, set Select On/Off Switch #5 UP and #7 DOWN. On the
SQC-310 System Menu / Sensors & Sources, set up the Source with:
Number of Positions: 8
Control Type: BCD
Feedback Type: In Position
Indexer Delay: 5 seconds
MDC 991270 and Sycon SRT-400 Indexer compatibility: The pocket select and
interlock pins (1, 2, 3, 7) are identical to the MDC and Sycon indexers. For a
compatible pocket ready signal (pin 5), ground pin 4 (jumper pin 4 to pin 6, 8, or 9).
The pocket position outputs of the MDC/Sycon indexer (pins 4, 8, or 9) are seldom
used. Set Select Switch #7 UP.
2.8.1.2 Binary I/O
To use the CI-100 binary I/O for a four pocket crucible:
SQC-3XX
CI-100 Binary I/O
Pin 1,3,5,14,24 ---------------- Pin 1,2
Common
Pin 16 ------------<-------------- Pin 3
OutX Pocket Ready
Pin 15 ------------>-------------- Pin 4
OutX Pocket 1
Pin 2 -------------->-------------- Pin 6
OutX Pocket 2
Pin 4 -------------->-------------- Pin 8
OutX Pocket 3
Pin 6 -------------->-------------- Pin 10
OutX Pocket 4