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Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual

Page 5

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1318 Duff Drive

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Fort Collins, Colorado 80524

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(970) 416-9660

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Fax (970) 416-9330

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Sigma

instruments

Example:

T

A

Zeroes time display on unit.

Command:

U

Parameters: 0 to 33

Description: Controls operation of the SQC-122.

0 = Start Process

6 = Start Process 1

1 = Stop Process

7 = Start Process 2

2 = Start Layer

8-30 = Start Process 3-25

3 = Stop Layer

31 = Soak Hold

4 = Start Next Layer

32 = Zero Thickness

5 = Force Final Thickness

33 = Zero Time

Example:

U1

A

Starts the first layer of the active process.

Command:

V

Parameters: None

Description: Controls operation of the SQC-122.

0 = Stopped

8 = Soak 2

16 = Start Next Layer

1 = Crystal Verify

9 = Soak Hold

17 = Crystal Fail

2 = Initialize layer

10 = Shutter Delay

18 = Stop Layer

3 = Manual Start Layer

11 = Deposit

19 = Manual Power

4 = Pocket Rotate

12 = Rate Ramp

5 = Ramp 1

13 = Rate Ramp Deposit

6 = Soak 1

14 = Timed Power

7 = Ramp 2

15 = Idle Ramp

Example:

U1

A9

Units is in Soak Hold phase.

Command:

Y

Parameters: None.

Description: Read the Power-Up Reset flag. The Power-Up Reset flag is set during

boot-up of the unit and stays set until read through the RS-232 interface.