INFICON SQC-122 Thin Film Deposition Controller Communications Manual - Manual (Page 21)

1318 Duff Drive
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Fort Collins, Colorado 80524
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(970) 416-9660
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Fax (970) 416-9330
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Sigma
instruments
int Tooling film tooling factor
char Name[16] film name
Material Data
single
Density material density (gm/cc)
single ZFactor material z factor
char MatName[16] material name
InOut Data
Int
Io(8)
122Sys Data
double Period
measurement period (sec.)
int SysTool system tooling
int Xtool(1) individual sensor tooling
int SimMode simulation mode (1 = on)
double FMin minimum frequency
double FMax maximum frequency
double PwrScale(1)
double RateDev
Measurement Data
double TimeStamp
time relative to start time data was acquired
double AvgRate average rate
double AvgThick average thickness
double Power(1) average power
double ChRate(5) up to six individual channels of rate
double ChThick(5) up to six individual channels of thickness
double ChFreq(5) up to six individual channels of frequency