INFICON SQC-122 Thin Film Deposition Controller Communications Manual - Manual (Page 20)

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Sigma
instruments
Data Structures:
The size of each data type in the structures is :
double : 8 bytes, the LSB is thrown out before transmission to the unit.
single : 4 bytes
int : 2 bytes.
char : 1 byte.
Process Data
int
NumLayers number of layers in the process
int FirstLayer film number of first layer
char ProcName[16] process name
Layer Data
single
Rate layer rate
single FnlThick final thickness
integer TimeSet time setpoint (sec.)
single ThickLimit thickness limit setpoint
int FilmNum layer’s film number
int NextLayer next layer number
int StartMode auto(0) or manual (1)
int Default l ayer is in the active process (1)
Film Data
int
Pterm proportional term
single Iterm integral term
single Dterm differential term
int Sensor1 sensor 1 on/off
int Sensor2 sensor 2 on/off
int Output active output (0/1)
single MaxPower 0 to 100%
single SlewRate 0 to 100%
int MatIndex film material number
single R1Power ramp 1 power (%)
single R1Time ramp 1 time (sec.)
single S1Time soak 1 time (sec.)
single R2Power ramp 2 power (%)
single R2Time ramp 2 time (sec.)
single S2Time soak 2 time (sec.)
single IdlePwr idle power (%)
single IdleTime idle time (sec.)
int Pocket source pocket