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Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual

Page 14

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1318 Duff Drive

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Fort Collins, Colorado 80524

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(970) 416-9660

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Fax (970) 416-9330

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Sigma

instruments

Example:

ReturnVal = SendGetMaterial(MaterialNum)

request transfer Material #

do while(ChkCommDone == -1)

wait for comm to finish

ReturnVal = Get122Material(&MaterialStruct)

MaterialSruct contains info

SendGetRunState

Parameters: None
Return : 16 Bit Integer, always returns a 1.

SendGetRunState is used to retrieve the operating phase of the deposition. This
function must precede the use of GetRunState.

GetRunState

Parameters: None
Return : 16 Bit Integer

GetRunState returns an integer whose value represents the current operating
phase of the instrument, as shown below:

0 = Stopped

8 = Soak 2

16 = Start Next Layer

1 = Crystal Verify

9 = Soak Hold

17 = Crystal Fail

2 = Initialize layer

10 = Shutter Delay

18 = Stop Layer

3 = Manual Start Layer

11 = Deposit

19 = Manual Power

4 = Pocket Rotate

12 = Rate Ramp

5 = Ramp 1

13 = Rate Ramp Deposit

6 = Soak 1

14 = Timed Power

7 = Ramp 2

15 = Idle Ramp

UnitControl

Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.

UnitControl is used to set the operating state of the SQC-122.

0 = Start Process

6 = Start Process 1

1 = Stop Process

7 = Start Process 2

2 = Start Layer

8-30 = Start Process 3-25

3 = Stop Layer

31 = Soak Hold

4 = Start Next Layer

32 = Zero Thickness

5 = Force Final Thickness

33 = Zero Time