Sigma – INFICON SQC-122 Thin Film Deposition Controller Communications Manual User Manual
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Fort Collins, Colorado 80524
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(970) 416-9660
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Fax (970) 416-9330
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Sigma
instruments
Example:
ReturnVal = SendGetMaterial(MaterialNum)
request transfer Material #
do while(ChkCommDone == -1)
wait for comm to finish
ReturnVal = Get122Material(&MaterialStruct)
MaterialSruct contains info
SendGetRunState
Parameters: None
Return : 16 Bit Integer, always returns a 1.
SendGetRunState is used to retrieve the operating phase of the deposition. This
function must precede the use of GetRunState.
GetRunState
Parameters: None
Return : 16 Bit Integer
GetRunState returns an integer whose value represents the current operating
phase of the instrument, as shown below:
0 = Stopped
8 = Soak 2
16 = Start Next Layer
1 = Crystal Verify
9 = Soak Hold
17 = Crystal Fail
2 = Initialize layer
10 = Shutter Delay
18 = Stop Layer
3 = Manual Start Layer
11 = Deposit
19 = Manual Power
4 = Pocket Rotate
12 = Rate Ramp
5 = Ramp 1
13 = Rate Ramp Deposit
6 = Soak 1
14 = Timed Power
7 = Ramp 2
15 = Idle Ramp
UnitControl
Parameters: 16 Bit Integer.
Return : 16 Bit Integer, always returns a 1.
UnitControl is used to set the operating state of the SQC-122.
0 = Start Process
6 = Start Process 1
1 = Stop Process
7 = Start Process 2
2 = Start Layer
8-30 = Start Process 3-25
3 = Stop Layer
31 = Soak Hold
4 = Start Next Layer
32 = Zero Thickness
5 = Force Final Thickness
33 = Zero Time