INFICON SRT-422 Crucible Indexer - Manual (Page 45)

Installation Page 43
Section 3.12: initial phase adjustment
The home position will almost certainly have to be reset after the indexer is installed. This
initial phase adjustment can be accomplished in either of two ways, both described in detail
below. The electromechanical method necessitates breaking vacuum and lowering and
swinging out the source tray. However, this method allows extremely precise phase
adjustment. The electronic method lets you reset the home position using front panel controls
alone. However, it may prove difficult to achieve the desired accuracy with this method, as it
entails judging the accuracy of the phase adjustment while observing the source at an angle
through a view port.
Ø
AUTO
MAN
SRT-422 ON OFF
MULT-POCKET E-BEAM INDEXER
0
instrument
0
Pocket
Position
LED
Manual / Auto Mode
Switch
Phase Adjustment
Pushbutton
ON / OFF Switch
Pocket Selection Thumbwheel
Figure 3.10: Control/display features on the control unit’s front panel
Electromechanical Method
DANGER: HIGH VOLTAGE
If a high-voltage power supply is installed in the vacuum system in which the SRT-422 has
been installed, observe all applicable high-voltage precautions in performing the following
procedure. These precautions include making sure that the high-voltage is OFF and using a
properly connected grounding rod to neutralize any residual charge on the structures on and
around the source tray.
STEP NO. PROCEDURE
1 Perform the following sub steps only if a high-voltage power supply is
connected to the vacuum system in which the SRT-422 is being installed.
Otherwise, proceed to step 2.
(a)Make sure that the high-voltage power supply is switched OFF.