General information & specifications, Srt-422, Mult-pocket e-beam indexer – INFICON SRT-422 Crucible Indexer User Manual
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General Information & Specifications
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Section 1
General Information & Specifications
Section 1.1: Introduction
The Source Rotation Indexer (SRT-422) is a stepping motor driver unit with optical
encoding for the positioning and rotation of multi-pocket electron beam sources. The SRT-422
is unique to other rotation controllers because the motor is small and compact separate from
the driver, and control electronics.. The unit is designed to attach to the input shaft (air side) of
a rotary vacuum feedthrough. For ease of installation, complete installation packages are
available which include either a 1” bolt Rotary Feedthrough or a 2 ¾” Del Seal Rotary
Feedthrough.
The Indexer can be controlled manually from a remote control panel, or automatically
from STC I/O Input or the RS 232 computer interface. It can control a 3, 4, 6 or 8 pocket
source in either a unidirectional or bi-directional manner. (the bi-directional mode, takes the
shortest path to the next selected pocket). The unit can be used to rotate a continuous trough
source at one of seven selected rotation speeds. For the multi-pocket UHV source, it has the
capability of limiting rotation to 270 degrees (3 pockets) from the pocket 1 position. Three
variations of 3 pocket source rotation control are provided (2 Standard pockets, 1 ‘banana’
pocket) which allow for different retrograde motion of the banana pocket (120°, 135° and 145°
sweep). Five rotational speeds are available for sweeping the ‘banana’ pocket. In addition,
custom firmware can be added to control other variations of sources.
Ø
AUTO
MAN
SRT-422
ON
OFF
MULT-POCKET E-BEAM INDEXER
0
instruments
0
Figure 1.1: SRT-422 Front Panel
Section 1.2: Unpacking
When opening the shipping package, you should find the following items: