INFICON STM-1 Thin Film Deposition Monitor - Manual (Page 9)

2.2.2 Run Time Data Group:
All members of this group are query only.
Run Time Data:
Record#
(dec/hex/ASCII)
Name Type Description
97/61/a CfgPrmSSID Uchar Configuration parameter session ID used to compute data. See note 2.6
98/62/b Srlno Uint Measurement serial number.
99/63/c RawFreq Double Channel freq. (Hz)
100/64/d GoodFreq Double Last used, good channel freq. (Hz). Used to compute rate and thickness.
101/65/e RawThick Double Computed raw thickness, from frequency. (A)
102/66/f XtalThick Double Computed material related thickness, can be zeroed. (A)
103/67/g XtalThick_F Double Filtered computed material related thickness, can be zeroed. (A) See note
2.7.
104/68/h XtalRate Double Rate, angstroms per second.
105/69/i XtalRate_F Double Rate, angstroms per second, filtered. See note 2.8.
106/6A/j XtalLife Double XtalLife (%). 0 if RawFreq = Fm, 100 if RawFreq = Fq, linear in between.
107/6B/k XtalQual Uchar Quality level (0-9).
108/6C/l XtalQualPeak Uchar Highest quality level seen (0-9).
109/6D/m XtalStab Uchar Stability level (0-9).
110/6E/n XtalStabPeak Uchar Highest stability level seen (0-9).
111/6F/o XtalStat XPROB_class Channel status. See XPROB_class description below.
112/70/p XtalLife_C Uchar XtalLife (%). 0 if RawFreq = Fm, 100 if RawFreq = Fq, linear in between.
XPROB_class description (single byte record):
Bit Weight Description
0:XPROB_NONE No Problems. The rest below are prioritized.
1:XPROB_FREQ Frequency of xtal is > Fq or < Fm. Halts all other calculations. The only updated members are
Srlno and RawFreq. Highest Priority.
2:XPROB_LOWLIFE Frequency was bad (previous XtalStat was XPROB_FREQ) and frequency is now in range, but
life is less than 3%. This is a hysteresis band. Updated members are Srlno, RawFreq, XtalLife
and XtalLife_C.
3:XPROB_S_FAIL Stability level XtalStab of xtal >= SlvlTrip. Updated members are Srlno, RawFreq, XtalLife
XtalLife_C, XtalStab and XtalStabPeak.
4:XPROB_MATH Unable to determine rate because of a computation error, most likely caused by a parameter
(density, z-ratio, etc) having a zero or otherwise invalid (non numeric or infinity) value. Updated
members are Srlno, RawFreq, XtalLife, XtalLife_C, XtalStab XtalStabPeak, and RawThick.
5:XPROB_Q_FAIL XtalQual of xtal >= QlvlTrip. All members updated. Lowest Priority
Note 2.6: CfgPrmSSID: This record is a tag, used to identify what configuration parameters group session was used for the
computation of data. When a configuration parameter group is committed, the SessId is copied from that group to this runtime
data group. This allows a context to be known of what configuration parameters were used.
Note 2.7: XtalThick_F: Filtered thickness. This is the average thickness over 2 seconds (20 samples) minus the most recent 3
samples (.3 seconds). This is also useful when crystal fails, because this data member does not contain the last three samples
before crystal failed, the thickness information reflected here will be most accurate.
Note 2.8: XtalRate_F: Filtered rate. This is the average rate over 2 seconds (20 samples) minus the most recent 3 samples (.3
seconds). This is also useful when crystal fails, because this data member does not contain the last three samples before crystal
failed, the rate information reflected here will be most accurate.
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