INFICON STM-1 Thin Film Deposition Monitor User Manual
Page 16
Material Symbol
Bulk
Density
Z
Factor
gm/CC
Mercury
Hg
13.46
0.740
Molybdenum
Mo
10.2
0.257
Neodynium
Fluoride
NdF3
6.506
--------
Neodynium
Oxide Nd2O3
7.24
--------
Nickel
Ni
8.91
0.331
Niobium
Nb
8.57
0.493
Niobium
(V)
Oxide
Nb2O5
4.47
--------
Palladium Pd
12.0
0.357
Platinum Pt
21.4
0.245
Potassium
Chloride
KCl
1.98
2.050
Rhenium Re
21.04
0.150
Rhodium Rh
12.41
0.210
Rubidium Rb
1.53
2.540
Samarium Sm
7.54
0.890
Scandium Sc
3.00
0.910
Selenium Se
4.82
0.864
Silicon
Si
2.32
0.712
Silicon
(II)
Oxide
SiO
2.13
0.870
Silicon
Dioxide
SiO2
2.20
1.070
Silver
Ag
10.5
0.529
Silver
Bromide
AgBr
6.47
1.180
Silver
Chloride
AgCl
5.56
1.320
Sodium
Na
0.97
4.800
Sodium
Chloride
NaCl
2.17
1.570
Sulfur
S
2.07
2.290
Tantalum Ta
16.6
0.262
Tantalum
(IV)
Oxide
Ta2O5
8.20
0.300
Tellurium Te
6.25
0.900
Terbium
Tb
8.27
0.660
Thallium Tl
11.85
1.550
Thorium
(IV)
Fluoride
ThF4
6.32
--------
Tin
Sn
7.30
0.724
Titanium Ti
4.50
0.628
Titanium
(IV)
Oxide
TiO2
4.26
0.400
Titanium
Oxide
TiO
4.90
--------
Tungsten W
19.3
0.163
Tungsten
Carbide
WC
15.6
0.151
Uranium
U
18.7
0.238
Vanadium
V
5.96
0.530
Ytterbium Yb
6.98
1.130
Yttrium
Y
4.34
0.835
Yttrium
Oxide
Y2O3
5.01
--------
Zinc
Zn
7.04
0.514
Zinc
Oxide
ZnO
5.61
0.556
Zinc
Selenide
ZnSe
5.26
0.722
Zinc
Sulfide
ZnS
4.09
0.775
Zirconium
Zr
6.51
0.600
Zirconium
Oxide
ZrO2
5.6
--------
16