INFICON STM-1 Thin Film Deposition Monitor - Manual (Page 2)

Warranty ......................................................................................................................................................... 1
SYCON INSTRUMENTS, INC.................................................................................................................................................. 1
EQUIPMENT RETURN ............................................................................................................................................................. 1
1. Hardware ..................................................................................................................................................... 3
1.1 Specifications: ....................................................................................................................................................................... 3
1.2 Connections:.......................................................................................................................................................................... 3
1.3 Dipswitch Settings:................................................................................................................................................................ 3
1.4 Status/Communication LEDs ................................................................................................................................................ 4
2. Communications ......................................................................................................................................... 5
2.1 Protocol Structure:................................................................................................................................................................. 5
2.2 Data Access: .......................................................................................................................................................................... 7
2.2.2 Run Time Data Group: ....................................................................................................................................................... 9
2.2.3 Utilities Group:................................................................................................................................................................. 10
2.2.4 Analog Output: ................................................................................................................................................................. 11
2.2.5 Firmware Version............................................................................................................................................................. 11
2.3 Forming the Data Field:....................................................................................................................................................... 12
3. Calibration and Theory............................................................................................................................ 13
3.1 Measurement Theory........................................................................................................................................................... 13
3.2 Rate Computation................................................................................................................................................................ 13
3.3 Thickness Reading Calibration............................................................................................................................................ 13
3.4 Density Determination......................................................................................................................................................... 13
3.5 Density................................................................................................................................................................................. 13
3.6 Z-Factor Determination ....................................................................................................................................................... 14
3.7 Tooling Determination ........................................................................................................................................................ 14
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