3 utilities group – INFICON STM-1 Thin Film Deposition Monitor User Manual
Page 10
Quality monitor: Monitors the quality of the deposition system by dividing the rate error (XtalRate_F-RateReq) by the
requested rate and multiplying by 100, then taking the absolute value to determine a percent error: |(((XtalRate_F-RateReq)/
RateReq)*100)|. The percent error is then broken up into ten categories:
Quality category (XtalQual)
% Error
0
0.0 – 4.9999
1
5.0 – 7.4999
2
7.5 – 9.9999
3
10.0 - 12.4999
4
12.5 - 14.9999
5
15.0 - 19.9999
6
20.0 - 24.9999
7
25.0 - 29.9999
8
30.0 - 39.9999
9 40.0
and
up
Stability monitor: Monitors the frequency stability of the crystal. Single-measurement positive frequency hops are detected, and
all positive frequency hops are accumulated. This data is then broken into ten categories:
Stability category (XtalStab)
Single measurement pos delta
Accumulated positive deltas
0
<25 Hz
<25Hz
1
25 Hz
25 Hz
2 50
Hz
100
Hz
3
100 Hz
101 Hz
4
100 Hz
200 Hz
5
200 Hz
201 Hz
6
400 Hz
400 Hz
7
600 Hz
600 Hz
8
1000 Hz
1000 Hz
9
1000 Hz
5000 Hz
2.2.3 Utilities Group:
Some members of this group can be updated and others are query only.
Record#
(dec/hex/ASCII)
Name Type
Description
48/30/0
Endiansel
Uchar
Query only. Endian select. See note 2.9.
49/31/1
Frmwrchsum
Uint
Query only. Firmware Checksum. (Build).
50/32/2
CH1_OPS
XtalOP_class
Semaphore record. See note 2.10.
51/33/3
CH1_CPY
CPY_CFG_OP_class Semaphore record. See notes 2.10 and 2.11.
52/34/4
Serial Number Ulong
Query only. STM1’s factory programmed serial number
53/35/5
Build type
Uint
Query only. STM1’s factory programmed build type.
54/36/6
Aout_wdog
Uchar
Analog output watchdog timeout, in seconds. (0-255)
55/37/7
Aout_value
Uint
Analog ouput value. 0-4095 is 0-10 V nominal.
XtalOP_class (single byte)
D7 D6 D5
D4
D3
D2
D1
D0
X X Clear
serial
number to
Srlno = 0
Clear error to
XtalStat = 0
Clear rate
filter
Clear stability info
XtalStab = 0
XtalStabPeak = 0
Clear quality info
XtalQual = 0
XtalQualPeak = 0
Zero thickness
XtalThick = 0
10