Agilent Technologies Agilent B2201A - Manual (Page 127)

Agilent B2200 User’s Guide, Edition 4 4-27
Programming
Capacitance Compensation
To Perform Measurement and Compensation
Perform the capacitance measurement and compensation as shown below.
1. Set the Agilent 4284A measurement condition. Then the frequency must be the
value (Fmeas) used when the compensation coefficients are measured.
2. Before contacting the device under test (DUT), perform the Cp-G measurement
in the open condition at the end of the measurement path including positioner or
probe card, and record the measurement data (C1 and G1). See Table 4-12.
3. Perform the compensation by using the capacitance compensation function, and
record the result data (C1r and G1r).
See Table 4-13 for the example to use the capacitance compensation function.
This example uses Microsoft Visual C++.
4. Contact the DUT, perform the Cp-G measurement, and record the measurement
data (C2 and G2).
5. Perform the compensation and record the result data (C2r and G2r).
6. Perform the following calculation and record it as the capacitance value.
C = C2r - C1r
Table 4-12 Recording Measurement/Compensation Data
step
Measurement/Compensation Data
C (F) G (S)
2 (measured) C1 = G1 =
3 (compensated) C1r = G1r =
4 (measured) C2 = G2 =
5 (compensated) C2r = G2r =
6 (calculated) C =