Alicat scientific, inc – Alicat VC Series Volumetric Flow Controller User Manual
Page 40
40
520-290-6060 Ph. 520-290-0109 Fax
Alicat Scientific, Inc.
2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
Rev. No.
Description
Date
MC & VC Series:
0 - 100SCCM
0 - 200SCCM
0 - 500SCCM
0 - 1SLPM
0 - 2SLPM
0 - 3SLPM
0 - 5SLPM
0 - 10SLPM
0 - 20SLPM
2045 N. Forbes Blvd. Suite 103 Tucson, AZ 85745
520-290-6060 Ph. 520-290-0109 Fax
Alicat Scientific, Inc.
Rev. No.
Description
Date
MC & VC Series:
0 - 0.5SCCM
0 - 1SCCM
0 - 2SCCM
0 - 5SCCM
0 - 10SCCM
0 - 20SCCM
0 - 50SCCM