Alicat VC Series Volumetric Flow Controller User Manual
Page 36
36
Specification
Mass Controller
Volumetric Controller
Description
Accuracy
± (0.8% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
High Accuracy Option
± (0.4% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
Repeatability
± 0.2%
Full Scale
Operating Range
1% to 100% Full Scale
Measure
Typical Response Time
100
Milliseconds (Adjustable)
Standard Conditions (STP)
25ºC & 14.696PSIA
Not Applicable
Mass Reference Conditions
Operating Temperature
−10 to +50
ºCelsius
Zero Shift
0.02%
Full Scale / ºCelsius / Atm
Span Shift
0.02%
Full Scale / ºCelsius / Atm
Humidity Range
0 to 100%
Non–Condensing
Controllable Flow Rate
102.4%
Full Scale
Maximum Pressure
145
145
1
PSIG
Input /Output Signal Digital Mass, Volume, Pressure
& Temperature
Volumetric Flow
RS-232 Serial
Input / Output Signal Analog
Mass Flow
Volumetric Flow
0-5Vdc
Optional Input / Output
Signal Secondary Analog
Mass, Volume, Pressure
or Temperature
Volumetric Flow
0-5 Vdc or 0-10Vdc or
4-20mA
Electrical Connections
8 Pin
Mini-DIN
Supply Voltage
12 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current
0.250Amp
Mounting Attitude Sensitivity
None
Warm-up Time
< 1
Second
Wetted Materials
2
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 410 Stainless Steel, Silcon, Glass.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.
Technical Data for Micro-Flow and Ultra-Low Flow Mass & Volumetric Flow Controllers
0 to 0.5SCCM Full Scale through 0 to 50SCCM Full Scale
Mechanical Specifications
Full Scale Flow
Mass Controller
Full Scale Flow
Volumetric
Controller
Mechanical
Dimensions
Process
Connections
1
Pressure Drop
2
(PSID)
0.5SCCM up to
50SCCM
0.5CCM up to
50CCM
3.9”H x 3.4”W x 1.1”D
M5 (10-32) Female
Thread*
1.0
∗
Units ≤50SCCM F.S. are shipped with M5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.
These adaptor fittings were selected for customer convenience in process connection. It should be noted that
the 1/8” Female NPT introduces additional dead volume. To minimize dead volume, please see Accessories
for the M5 (10-32) Male to 1/8”OD compression fitting.
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, please contact the manufacturer.
Dimensional Drawings: page 40