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Alicat VC Series Volumetric Flow Controller User Manual

Page 36

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36

Specification

Mass Controller

Volumetric Controller

Description

Accuracy

± (0.8% of Reading + 0.2% of Full Scale)

At calibration conditions after tare

High Accuracy Option

± (0.4% of Reading + 0.2% of Full Scale)

At calibration conditions after tare

Repeatability

± 0.2%

Full Scale

Operating Range

1% to 100% Full Scale

Measure

Typical Response Time

100

Milliseconds (Adjustable)

Standard Conditions (STP)

25ºC & 14.696PSIA

Not Applicable

Mass Reference Conditions

Operating Temperature

−10 to +50

ºCelsius

Zero Shift

0.02%

Full Scale / ºCelsius / Atm

Span Shift

0.02%

Full Scale / ºCelsius / Atm

Humidity Range

0 to 100%

Non–Condensing

Controllable Flow Rate

102.4%

Full Scale

Maximum Pressure

145

145

1

PSIG

Input /Output Signal Digital Mass, Volume, Pressure

& Temperature

Volumetric Flow

RS-232 Serial

Input / Output Signal Analog

Mass Flow

Volumetric Flow

0-5Vdc

Optional Input / Output

Signal Secondary Analog

Mass, Volume, Pressure

or Temperature

Volumetric Flow

0-5 Vdc or 0-10Vdc or

4-20mA

Electrical Connections

8 Pin

Mini-DIN

Supply Voltage

12 to 30 Vdc (15-30Vdc for 4-20mA outputs)

Supply Current

0.250Amp

Mounting Attitude Sensitivity

None

Warm-up Time

< 1

Second

Wetted Materials

2

303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced

Nylon, Aluminum, Brass, 410 Stainless Steel, Silcon, Glass.

1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For

operating pressures >10PSIG, please contact the manufacturer for more details.

2. If your application demands a different material, please contact the manufacturer for available options.

Technical Data for Micro-Flow and Ultra-Low Flow Mass & Volumetric Flow Controllers

0 to 0.5SCCM Full Scale through 0 to 50SCCM Full Scale

Mechanical Specifications

Full Scale Flow

Mass Controller

Full Scale Flow

Volumetric

Controller

Mechanical

Dimensions

Process

Connections

1

Pressure Drop

2

(PSID)

0.5SCCM up to

50SCCM

0.5CCM up to

50CCM

3.9”H x 3.4”W x 1.1”D

M5 (10-32) Female

Thread*

1.0

Units ≤50SCCM F.S. are shipped with M5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fittings.

These adaptor fittings were selected for customer convenience in process connection. It should be noted that

the 1/8” Female NPT introduces additional dead volume. To minimize dead volume, please see Accessories

for the M5 (10-32) Male to 1/8”OD compression fitting.

1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter

fittings.

2. Venting to atmosphere. Lower Pressure Drops Available, please contact the manufacturer.

Dimensional Drawings: page 40