Alicat VC Series Volumetric Flow Controller - Manual (Page 37)

37
Specification Mass Controller Volumetric Controller Description
Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Not Applicable Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 145 1 PSIG
Input /Output Signal Digital Mass, Volume, Pressure
& Temperature
Volumetric Flow RS-232 Serial
Input / Output Signal Analog Mass Flow Volumetric Flow 0-5Vdc
Optional Input / Output
Signal Secondary Analog
Mass, Volume, Pressure
or Temperature
Volumetric Flow
0-5 Vdc or 0-10Vdc or 4-
20mA
Electrical Connections 8 Pin Mini-DIN
Supply Voltage 12 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current 0.250 Amp
Mounting Attitude Sensitivity None Tare after installation
Warm-up Time < 1 Second
Wetted Materials 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum, Brass, 410 Stainless Steel, Silcon, Glass.
1. Volumetric meters only: Operating pressure limitations determined by Reynolds number thresholds. For
operating pressures >10PSIG, please contact the manufacturer for more details.
2. If your application demands a different material, please contact the manufacturer for available options.
Technical Data for Low Flow Mass & Volumetric Flow Controllers
0 to 100SCCM Full Scale through 0 to 20SLPM Full Scale
Mechanical Specifications
Full Scale Flow
Mass Controller
Full Scale Flow
Volumetric
Controller
Mechanical
Dimensions
Process
Connections 1
Pressure Drop 2
(PSID)
100SCCM to
500SCCM
100CCM to
500CCM
4.1”H x 3.6”W x 1.1”D 1/8” NPT Female
1.0
1SLPM 1LPM 1.5
2SLPM 2LPM 3.0
5SLPM 5LPM 2.0
10SLPM 10LPM 5.5
20SLPM 20LPM 20.0
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fittings.
2. Venting to atmosphere. Lower Pressure Drops Available, please contact the manufacturer.
Dimensional Drawings: page 40