COSA Xentaur SF6 Purity Pro - Manual (Page 27)

27
TYPE-53 [FOR FUMIGATION GASES]
Selectable Measuring Gas and Range
Measuring Gas
(Display Indication)
Measuring
Range
(Minimum
Digit)
AIR CAL
Value
Drift
Amount
Spec. No.
1 Methyl bromide in
AIR
(CH3Br in AIR)
0~200 mg/l
(0.2)
0.0 mg/l 1.7 mg/l SPE- 1405
2 Phosphine in AIR
(PH3 in AIR)
0~50 mg/l
(0.1)
0.0 mg/l 0.8 mg/l SPE- 1406
3 Methyl iodide in AIR
(CH3I in AIR)
0~200 mg/l
(0.2)
0.0 mg/l 1.7 %mg/l SPE- 1407
4 Methyl bromide in
AIR
(CH3Br in AIR)
0~5 vol%
(0.005)
0.000
vol%
0.044
vol%
SPE- 1408
5 Propylene oxide in
AIR
(PO in AIR)
0~10 vol%
(0.005)
0.000
vol%
0.038
vol%
SPE- 1448
6 Sulfuryl fluoride in
AIR
(SO2F2 in AIR)
0~200 mg/l
(0.5)
0.0 mg/l 2.9 mg/l SPE- 1828
7 ---------------- ----------------- --------------- ----------------- -----------------
8 ----------------- ----------------- --------------- ----------------- -----------------
Interferometer Type: Type120MM
Indication Accuracy: ± (Indication Value – AIR CAL Value) x 0.03 ± Drift Amount
AIR CAL Value: Concentration indicated on the display when AIR CAL key is pressed.
Drift Amount: The amount of indication drifting when temperature changes ±10ºC.
Special Caution:
1) Define Methyl bromide 2.53 vol% as 100 mg/l.
2) Define Phosphine 7.07 vol% as 100 mg/l.
3) Define Methyl iodide 1.69 vol% as 100 mg/l.
4) This instrument measures combustible gas around lower explosive limits in this
specification. Take enough sample for the measure.
5) Define Sulfuryl fluoride 2.35 vol% as 100 mg/l.