Brooks Instrument 4800 Series - Manual (Page 7)

1-1
Brooks ® 4800 Series
Section 1 Introduction Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
September, 2013
1-1 How to Use This Manual
This instruction manual is intended to provide the user with all the
information necessary to install, operate and maintain the Brooks 4800
Series Products.
This manual is organized into the following sections:
Section 1. Introduction
Section 2. Installation
Section 3. Operation
Section 4. Maintenance and Troubleshooting
Section A. Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
1-2 Description
The Brooks 4800 Series Products are mass flow measurement devices
designed for accurately measuring (MFMs) and rapidly controlling (MFCs)
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
Model 4850 mass flow controller(MFC) and 4860 mass flow meter (MFM).
1-3 Specifications for Meter/Controller
PERFORMANCE CHARACTERISTICS:*
Flow Range
FS ranges from 50 mln/min – 40 ln/min (50 sccm – 40 slpm)
(N
2
equivalent, at reference 0°C)
Control Range
2 – 100%
Accuracy Options
±3.0% of FS
±1.0% of FS
Repeatability
±0.15% of FS
Response Time
Flow signal: <0.3 sec
Flow control: Settling time <0.75 sec from 0 to 100% F.S. (typical <0.5 sec
for all steps)
Temperature Coefficient
±0.1% FS/°C (N
2
)
RATINGS:
Gases
Air, N
2
, O
2
, Ar, He, H
2
, CO
2
, CO, N
2
O, CH
4
, C
3
H
6
, C
3
H
8
(for other non-corrosive gases and mixed gases, contact factory)