Brooks, 4800 series – Brooks Instrument 4800 Series User Manual
Page 18
2-6
Brooks
®
4800 Series
Section 2 Installation
Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
September, 2013
h. Check the analog output signal. The output signal should match the
setpoint signal in accordance with the accuracy specifications provided
in Section 1 of this document.
i. If flow output signal does not match the setpoint, and pressure settings
are correct, this could indicate a problem in the MFC. A secondary issue
could be the gas type. When checking with a surrogate gas, ensure that
there is enough pressure to the MFC in order to flow the correct amount
of the surrogate gas.
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