Brooks Instrument 4800 Series - Manual (Page 15)

2-3
Brooks ® 4800 Series
Section 2 Installation Installation and Operation Manual
X-TMF-4800-MFC-eng
Part Number: 541B072AAG
September, 2013
2-7 Mechanical Connections
If mechanical connections were ordered from Brooks Instrument, an
integrated filter of 40 microns is already installed in the upstream fitting.
This is to prevent the possibility of any foreign material entering the flow
sensor or control valve (for MFC).
If the 4800 Series product was ordered without fittings, there is no internal
filter in the device. In this case, it is recommended that an in-line filter rated
to at least 40 microns be installed upstream from the device.
Recommended installation procedures:
a. The Brooks MFC or MFM should be located in a clean,
dry atmosphere relatively free from shock and vibration.
b. Install in such a manner that permits easy removal if the instrument
requires servicing.
c. The Brooks MFC or MFM can be installed in any position.
However, mounting in orientations other than the original factory
calibration (see calibration data sheet supplied with the instrument) can
result in a <±0.2% maximum full scale shift after re-zeroing.
d. When installing a mass flow controller or meter with full scale flow rates
of 10 ln/min (10 slpm) or greater, be aware that sharp, abrupt angles in
the system piping directly upstream of the controller may cause a small
shift in accuracy. If possible, have at least ten pipe diameters of straight
tubing upstream of the mass flow controller or meter. This is not
required for meters with an integrated inlet filter.